Canatu invests in Lasertec’s PELMIS EUV pellicle inspection system to strengthen quality control and metrology capabilities


Igår, 08:00

Canatu Plc Press release 1 August 2025 at 9:00 am EEST

Canatu invests in Lasertec’s PELMIS EUV pellicle inspection system to strengthen quality control and metrology capabilities

Canatu Plc (CANATU, Nasdaq First North, Finland) has invested in the PELMIS EUV pellicle inspection system from Lasertec to enhance its metrology capabilities in the semiconductor industry. The system enables high-precision inspection of CNT pellicle membranes for particles down to 1 micron, reinforcing Canatu’s commitment to technological excellence and product quality.

The system is essential for verifying that Canatu’s CNT100 SEMI reactors consistently produce CNT pellicle membranes with particle levels below customer specifications, a key requirement for competing in the EUV pellicle market. PELMIS detects particles as small as 1 micron and automatically classifies whether they are on the front or back side of the membrane.

“We aspire to be the world’s leading CNT pellicle player. This investment is a key enabler for the long-term development of our CNT SEMI reactor and pellicle membrane business. It strengthens our competitiveness, elevates quality control to a new level, and helps ensure we meet the stringent quality requirements of our semiconductor customers,” said Juha Kokkonen, CEO of Canatu Plc.

The PELMIS system is scheduled for delivery to Canatu’s Vantaa factory in November 2025.

Additional information:

CEO Juha Kokkonen, tel. +358 405 430 367

Board member Tuomo Vähäpassi, tuomo.vahapassi@lifeline-spac1.com

Certified Adviser

DNB Carnegie Investment Bank AB (publ), tel. +46 (0)73 856 42 65

About Canatu

Canatu (CANATU, Nasdaq First North, Finland) is a fast-growing deep technology company creating advanced carbon nanotubes (Canatu CNTs), related products, and manufacturing equipment for the semiconductor, automotive, and medical diagnostics industries. Canatu partners with forerunner companies, together transforming products for better tomorrows with nano carbon.  

Canatu's versatile platform technology has broad potential applications. Its current core includes CNT membranes for extreme ultraviolet (EUV) processes in the semiconductor industry, enabling the manufacturing of the most advanced chips, as well as film heaters for advanced driver-assistance systems (ADAS) in the automotive industry. Additionally, electrochemical sensors for medical diagnostics are in the development phase. Canatu’s patented CNT reactors and Dry DepositionTM method yield clean and pristine CNTs. The company operates through two business models: selling CNT products directly, as well as selling CNT reactors and licensing the related technology so that customers can produce CNT products under a limited license.  

Headquartered in Finland, Canatu also operates in the US, Japan, and Taiwan. Founded in 2004 as a spin-off from Aalto University’s Nanomaterials Group, Canatu currently has around 140 employees representing 35 nationalities, with 20 percent holding or pursuing doctorates. Discover more at www.canatu.com and follow us on LinkedIn

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